PLATO

PLATO is a full automatic PL Mapping System

Specifications

Dimensions (W x D x H)

  • 1490 x 930 x 1410 mm

Weight

  • 480kg (Automatic)

Input Voltage

  • 220V / 30A

Compressed Air

  • 0.2 – 0.4MPa
  • X-Y Stage
  • Cassette Loading
  • Flat Zone Finder
  • Two Cassette for 2,4,6,8 Inch Wafer

Standard

  • 2 Inch
  • 4 Inch
  • 6 Inch
  • 8 Inch

Thickness

  • Measurement Method: Optical Interference by Reflection
  • Accuracy: 3% for GaN Film

Spectrometer

  • Wavelength Range: 420nm
  • Hardware Pixel Resolution: 0.13nm/pixel

Resolution

  • 0.5mm for 2″
  • 1mm for 4″
  • 2mm for 8″

Measurement Items

  • Wp (peak), Wd (dominant), Integrated and Peak Intensity, FWHM

Thickness / PL

  • PL & Thickness Measurement at the same time

Viewer Software

  • Line Profile, Suspector Viewer, etc.

Pumping Laser

  • Up to 3 Kinds of Lasers (255, 405, 532, etc.)
  • Can be Installed

Reproducibility

  • + 5μm

Measuring Range

  • 20 – 40μm

Cap (2inch Profile)

  • < 10 Sec

Bowing Mapping

  • Possible

Features

Features
High sensitive Photodetector is used in PL intensity measurement to improve Repeatability for time-to-time and machine-to-machine
Save time with same-time measurement of PL and thickeness
2inch - 8inch, up to 0.5mm step (height variation for different thickness wafer with adoption of z-stage)
Optional Bowing Mapping / Laser Marking
Capacity: 60,000pcs (2" with 2mm step)
Powerful Suspector Solution

Benefits

Benefits
Wafer options for 2" to 8"
Powerful susceptor viewer
Low maintenance
Manual or automatic loading
GEM/SECS Compatible
2646 Lehigh Street
Whitehall, PA 18052, USA
(610) 443-2015
sales@sunboundtechnology.com