Vacuum Pumps

Kitz provides ultra-compact dehumidification dryers for a variety of flow rates and fittings. All of these products are built with an advanced Hollow Fiber Membrane, which helps greatly reduce the impurities found in air, gas and liquid. Each product has benefits for specific industries and applications. Learn more about the Hollow Fiber Membrane and each dryer series below.

Features

  • Built in inlet and outlet HEPA filters*
  • The filter windows**
  • Oil-free for cleanroom use
  • Long term high reliability
  • Designed to minimize noise generation
  • Nylon body for static protection
  • Compact design
  • ESD Safe Tubing (Accessory)
  • Static-Dissipative Grounding Kit (Accessory)
  • HEPA Filter Kit (Replacement Part)
  • Compliance with CE regulations

HEPA filters trap 99.97% of all particles down to 0.3 microns

FV-10 Series

Can handle wafers up to 6"
• Flow Rate: 2.7 L/min (0.088 cfm)
• Pressure: 3 - 15 kPa
• Power Req: 110V
• Power Use: 5.0W
• Dimensions: 152 x 72 x 54mm

FV-30 Series

Can handle wafers up to 6"
• Flow Rate: 2.5 L/min (0.088 cfm)
• Pressure: -300 mmHg (-40 kPa)
• Power Req: 110 V
• Power Use: 5.0W
• Dimensions: 137 x 88 x 85mm

FV-60 Series

Can handle wafers up to 6"
• Flow Rate: 2.5 L/min (0.088 cfm)
• Pressure: -600 mmHg (-80 kPa)
• Power Req: 110 V
• Power Use: 10.0W
• Dimensions: 137 x 88 x 133mm

FV-W-110 Series

Can handle wafers up to 6"
• Flow Rate: 1.2 L/min (0.044 cfm)
• Pressure: -30kPa (Fixed)
• Power Req: 110 V
• Power Use: 5.0W
• Dimensions: 137 x 88 x 85 mm

Inquiries