Vacuum Pumps

  • Built in inlet and outlet HEPA filters*
  • The filter windows**
  • Oil-free for cleanroom use
  • Long term high reliability
  • Designed to minimize noise generation
  • Nylon body for static protection
  • Compact design
  • ESD Safe Tubing (Accessory)
  • Static-Dissipative Grounding Kit (Accessory)
  • HEPA Filter Kit (Replacement Part)
  • Compliance with CE regulations

HEPA filters trap 99.97% of all particles down to 0.3 microns

FV-10 Series

Can handle wafers up to 6"
• Flow Rate: 2.7 L/min (0.088 cfm)
• Pressure: 3 - 15 kPa
• Power Req: 110V
• Power Use: 5.0W
• Dimensions: 152 x 72 x 54mm

FV-30 Series

Can handle wafers up to 6"
• Flow Rate: 2.5 L/min (0.088 cfm)
• Pressure: -300 mmHg (-40 kPa)
• Power Req: 110 V
• Power Use: 5.0W
• Dimensions: 137 x 88 x 85mm

FV-60 Series

Can handle wafers up to 6"
• Flow Rate: 2.5 L/min (0.088 cfm)
• Pressure: -600 mmHg (-80 kPa)
• Power Req: 110 V
• Power Use: 10.0W
• Dimensions: 137 x 88 x 133mm

FV-W-110 Series

Can handle wafers up to 6"
• Flow Rate: 1.2 L/min (0.044 cfm)
• Pressure: -30kPa (Fixed)
• Power Req: 110 V
• Power Use: 5.0W
• Dimensions: 137 x 88 x 85 mm

2646 Lehigh Street
Whitehall, PA 18052, USA
(610) 443-2015
sales@sunboundtechnology.com