PLATO

Full Automatic Reflectivity Mapping System

PLATO is a full automatic PL Mapping System used to generate maps of several parameters over full wafers by measuring optical luminescence emission from materials excited with energy above their bandgap. EtaMax mapping systems are used in production environment to provide key information on epitaxy layer crystal quality, composition and homogeneity.

Features

Features
High sensitive Photodetector is used in PL intensity measurement to improve Repeatability for time-to-time and machine-to-machine
Save time with same-time measurement of PL and thickeness
2inch - 8inch, up to 0.5mm step (height variation for different thickness wafer with adoption of z-stage)
Optional Bowing Mapping / Laser Marking
Capacity: 60,000pcs (2" with 2mm step)
Powerful Suspector Solution

Dual mode measurement(PL/Thickness)

Bowing Mapping(option)

PLATO export to user customized excel template form

Flexible susceptor Designer/Viewer

Z-Height Optimization function for various substrate thinkness

Benefits

Benefits
Wafer options for 2" to 8"
Powerful susceptor viewer
Low maintenance
Manual or automatic loading
GEM/SECS Compatible

Specifications

Dimensions

  • 1490 x 930 x 1410 mm

Weight

  • 480kg (Automatic)

Input Voltage

  • 220V / 30A

Compressed Air

  • 0.4 – 0.6MPa

Specifications

  • XY&Z Stage
  • Wafer Transfer Robot
  • Wafer Pre-aligner
  • Cassette Loading
  • Flat Zone Finder
  • Two Cassette for 2,4,6,8 Inch Wafer

Standard

  • 2 Inch
  • 4 Inch
  • 6 Inch
  • 8 Inch

Thickness

  • Measurement Method: Optical Interference by Reflection
  • Accuracy: 3% for GaN Film

Spectrometer

  • Wavelength Range: 420nm
  • Hardware Pixel Resolution: 0.13nm/pixel

Resolution

  • 0.5mm for 2″
  • 1mm for 4″
  • 2mm for 8″

Measurement Items

  • Wp (peak), Wd (dominant), Integrated and Peak Intensity, FWHM

Thickness / PL

  • PL & Thickness Measurement at the same time

Reproducibility

  • ±3% (or ±3 ㎛ for under 100 ㎛ bowing)

Measuring Range

  • 20-1000 ㎛

Tact Time

  • < 10 Sec

Bowing Mapping

  • Possible

Viewer Software

  • Line Profile, Suspector Viewer, etc.

Pumping Laser

  • Up to 3 Kinds of Lasers (255, 405, 532, etc.)
  • Can be Installed

Reproducibility

  • ±3% (or ±3 ㎛ for under 100 ㎛ bowing)

Measuring Range

  • 20-1000 ㎛

Tact Time

  • < 10 sec

Bowing Mapping

  • Possible

Application

  • Clean room(Class -10,000)

Temperature

  • 15-35℃

Humidity

  • <85%RH with no condensation