Vacuum wands & wafer handling

Vacuum wands for semiconductor wafer handling

These wands are the safest means of wafer handling, and are offered in both PTFE and ESD safe materials. The tips are optimally sized for each wafer diameter, and their design ensures that contact is both minimal and secure. The contact surface itself is optically polished, providing excellent adhesion to a wafer. Tips are available in PCTFE, PEEK, Vespel and stainless steel. Two body styles are available – fixed tip and swivel joint – offering a choice of handling techniques. Our unique wand control valve ensures reliable suction and instantaneous release without particle generation.

Wands

Part number Description
C002-X-96-CP ESD safe vacuum wand for up to 6 inch (150 mm) wafers, normally open, swivel
C002-X-97-CP ESD safe vacuum wand for up to 8 inch (200 mm) wafers, normally open, swivel
C002-Y-91-CP ESD safe vacuum wand for up to 6 inch (150 mm) wafers, normally open
C002-Y-92-CP ESD safe vacuum wand for up to 8 inch (200 mm) wafers, normally open
C002-Y-98-CP ESD safe vacuum wand for up to 8 inch (200 mm) wafers, normally open, extended
Wand bodies
C002-X C002-X wafer handling wand body without tip, normally open
C002-Y C002-Y wafer handling wand body without tip, normally open
Tips
91-CP ESD safe conductive PEEK tip for up to 6 inch (150 mm) wafers, Y type fixed joint
92-CP ESD safe conductive PEEK tip for up to 8 inch (200 mm) wafers, Y type fixed joint
96-CP ESD safe conductive PEEK tip for up to 6 inch (150 mm) wafers, for swivel joint, X or Z connection
97-CP ESD safe conductive PEEK tip for up to 8 inch (200 mm) wafers, for swivel joint, X or Z connection
98-CP ESD safe conductive PEEK tip for up to 8 inch (200 mm) wafers, fixed joint Y, extended
Accessories
658 Vertical wall mount stand for normally open wand, with vacuum shut-off
659 Horizontal desktop stand for normally open wand, with vacuum shut-off
851-M Coiled ESD safe tubing, 3 mm ID, 5 mm OD, 2 m, relaxed
851-L Coiled ESD safe tubing, 4 mm ID, 6 mm OD, 2 m, relaxed
FV-30-240 Clean room vacuum pump, 300 mmHg, 2.5 l/min, 240 V, HEPA
FV-60-240 Clean room vacuum pump, 600 mmHg, 2.5 l/min, 240 V, HEPA
858 Static dissipative grounding kit for FV-10/30/60 pumps
901 Vacuum leak detector – wafer wand tip condition tester

Comments are closed.