Vacuum Wands and Tips – Wafer Handling

  • Our unique valve ensures reliable suction and release of a semiconductor wafer
  • The well polished inner wall of the valve part minimizes particle generation
  • The optically polished wafer tip provides excellent adhesion to a wafer
  • The wand body can be easily detached from the tubing
C002-X-96-CP ESD safe vacuum wand for up to 6 inch (150 mm) wafers, normally open, swivel
C002-X-97-CP ESD safe vacuum wand for up to 8 inch (200 mm) wafers, normally open, swivel
C002-Y-91-CP ESD safe vacuum wand for up to 6 inch (150 mm) wafers, normally open
C002-Y-92-CP ESD safe vacuum wand for up to 8 inch (200 mm) wafers, normally open
C002-Y-98-CP ESD safe vacuum wand for up to 8 inch (200 mm) wafers, normally open, extended
Wand bodies
C002-X C002-X wafer handling wand body without tip, normally open
C002-Y C002-Y wafer handling wand body without tip, normally open
Tips
91-CP ESD safe conductive PEEK tip for up to 6 inch (150 mm) wafers, Y type fixed joint
92-CP ESD safe conductive PEEK tip for up to 8 inch (200 mm) wafers, Y type fixed joint
96-CP ESD safe conductive PEEK tip for up to 6 inch (150 mm) wafers, for swivel joint, X or Z connection
97-CP ESD safe conductive PEEK tip for up to 8 inch (200 mm) wafers, for swivel joint, X or Z connection  

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