Vacuum Wands for Wafers

Vacuum wands are ideal for semiconductor wafer handling from 4″ to 12″ range. They handle a delicate and fragile wafer, part-wafer or die gently and precisely. The wands are available in ESD safe plastic or Teflon. We have a wide variety a tips and filters for different uses and applications.

Features

  • The vacuum wand body is plug and play for easy use
  • Compact and lightweight design
  • Unique valve ensures reliable suction and release of a semiconductor wafer
  • The well polished inner wall of the valve part minimizes particle generation
  • The optically polished wafer tip provides excellent adhesion to a wafer

Ordering Guide

Part Number

Material

C - Series

Made with Conductive Nylon

F - Series

Made with Teflon

Valve

001

Normally Closed (NC) Valve
Push button to pick up

002

Normally Open (NO) Valve
Push button to release

003

Normally Open w/ Switch (NO+SW) Valve
Push button to release

Connection

X

Ball Swivel Joint

Y

Fixed Joint

Z

Collet Chuck Joint

Wand Tip

CP

Conductive PEEK (Polyetheretherketon)

3F

PCTFE (Polychlorotrifluoroethlyene)

PK

PEEK (Polyetheretherketon)

VP

Vespel (Polyimide)

Products

C Series Wands

Made with Nylone
ESD Protection

F Series Wands

Made with Teflon body
No ESD Protection

Replacements Parts

Replacement parts for vacuum wafer handling wands

Information

Catalog

Use Fluoro Mechanic's interactive catalog to find the right part for your application.

Submit Inquiry

Submit an inquiry for quote or questions about our products