Vacuum Pump

Oil Free Diaphragm Vacuum Pump with Built in HEPA filters

 

FV-30 FV-60
Oil Free Diaphragm Vacuum Pump with Built in inlet and outlet HEPA filters: HEPA filters trap 99.97% of all particles down to 0.3 microns. Oil Free Diaphragm Vacuum Pump with Built in inlet and outlet HEPA filters: Do not let the pump inhale dust or fluid.
  • Built in inlet and outlet HEPA filters*
  • The filter windows**
  • Oil-free for cleanroom use
  • Long term high reliability
  • Designed to minimize noise generation
  • Nylon body for static protection
  • Compact design
  • ESD Safe Tubing (Accessory)
  • Static-Dissipative Grounding Kit (Accessory)
  • HEPA Filter Kit (Replacement Part)
  • Compliance with CE regulations
*HEPA filters trap 99.97% of all particles down to 0.3 microns.
**Let you know when to change HEPA filters

Specifications

Model FV-30-110 FV-60-110
Flow Rate 2.5 l/min (0.088 cfm) 2.5 l/min (0.088 cfm)
Ultimate Pressure -300 mmHg (-40 kPa) -600 mmHg (-80 kPa)
Power Requirement 100-120 VAC 100-120 VAC
Consumption Power 5.0 W 10.0 W
Dimensions (D x W x H) 137 x 88 x 85 mm 137 x 88 x 133 mm
Weight 800 g 1250 g
Duty Cycle Continuous Continuous
Life Expectancy > 8760 hours > 8760 hours
Wafer Size Up to 6-inch 8 and 12-inch
240VAC versions available (FV-30-240, FV-60-240)

Specifications are subject to change without notice.

Do not let the pump inhale dust or fluid.

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