Vacuum Pumps
Fluoro Mechanic’s vacuum pumps are designed for providing suction power to the vacuum wands for small die and multiple sizes of wafers. Each unit is oil-free and comes with a built in HEPA filter that can be used in clean room applications. They are compact, lightweight, and designed to minimize noise generation in your work environment.
Features
- Built in inlet and outlet HEPA filters
- Oil-free for cleanroom use
- Long term high reliability
- Designed to minimize noise generation
- Nylon body for static protection
- Compact design
HEPA filters trap 99.97% of all particles down to 0.3 microns
Products
FV-10 Series
Can handle wafers up to 4"
• Flow Rate: 2.7 L/min (0.088 cfm)
• Pressure: 3 - 15 kPa
• Power Req: 110V
• Power Use: 5.0W
• Dimensions: 152 x 72 x 54mm
FV-30 Series
Can handle wafers up to 6"
• Flow Rate: 2.5 L/min (0.088 cfm)
• Pressure: -300 mmHg (-40 kPa)
• Power Req: 110 V
• Power Use: 5.0W
• Dimensions: 137 x 88 x 85mm
FV-60 Series
Can handle wafers up to 8"
• Flow Rate: 2.5 L/min (0.088 cfm)
• Pressure: -600 mmHg (-80 kPa)
• Power Req: 110 V
• Power Use: 10.0W
• Dimensions: 137 x 88 x 133mm
FV-W-110 Series
Can handle wafers up to 12"
• Flow Rate: 1.2 L/min (0.044 cfm)
• Pressure: -30kPa (Fixed)
• Power Req: 110 V
• Power Use: 5.0W
• Dimensions: 137 x 88 x 85 mm