Fluoro Mechanic’s vacuum pumps are designed for providing suction power to the vacuum wands for small die and multiple sizes of wafers. Each unit is oil-free and comes with a built in HEPA filter that can be used in clean room applications. They are compact, lightweight, and designed to minimize noise generation in your work environment.
Features
Built in inlet and outlet HEPA filters
Oil-free for cleanroom use
Long term high reliability
Designed to minimize noise generation
Nylon body for static protection
Compact design
HEPA filters trap 99.97% of all particles down to 0.3 microns
Products
FV-10 Series
Can handle wafers up to 4"
• Flow Rate: 2.7 L/min (0.088 cfm)
• Pressure: 3 - 15 kPa
• Power Req: 110V
• Power Use: 5.0W
• Dimensions: 152 x 72 x 54mm
FV-30 Series
Can handle wafers up to 6"
• Flow Rate: 2.5 L/min (0.088 cfm)
• Pressure: -300 mmHg (-40 kPa)
• Power Req: 110 V
• Power Use: 5.0W
• Dimensions: 137 x 88 x 85mm
FV-60 Series
Can handle wafers up to 8"
• Flow Rate: 2.5 L/min (0.088 cfm)
• Pressure: -600 mmHg (-80 kPa)
• Power Req: 110 V
• Power Use: 10.0W
• Dimensions: 137 x 88 x 133mm
FV-W-110 Series
Can handle wafers up to 12"
• Flow Rate: 1.2 L/min (0.044 cfm)
• Pressure: -30kPa (Fixed)
• Power Req: 110 V
• Power Use: 5.0W
• Dimensions: 137 x 88 x 85 mm
For all product and equipment inquiries, please use the form below. One of our representatives will reach out shortly to assist you with product information or a sales quote.
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