Vacuum Wands for Wafers

Vacuum wands are ideal for semiconductor wafer handling from 4″ to 12″ range. They handle a delicate and fragile wafer, part-wafer or die gently and precisely. The wands are available in ESD safe plastic or Teflon. We have a wide variety a tips and filters for different uses and applications.

Features

  • The vacuum wand body is plug and play for easy use
  • Compact and lightweight design
  • Unique valve ensures reliable suction and release of a semiconductor wafer
  • The well polished inner wall of the valve part minimizes particle generation
  • The optically polished wafer tip provides excellent adhesion to a wafer

Ordering Guide

Part Number

Material

C - Series

Made with Conductive Nylon

F - Series

Made with Teflon

Valve

001

Normally Closed (NC) Valve
Push button to pick up

002

Normally Open (NO) Valve
Push button to release

003

Normally Open w/ Switch (NO+SW) Valve
Push button to release

Connection

X

Ball Swivel Joint

Y

Fixed Joint

Z

Collet Chuck Joint

Wand Tip

CP

Conductive PEEK (Polyetheretherketon)

3F

PCTFE (Polychlorotrifluoroethlyene)

PK

PEEK (Polyetheretherketon)

VP

Vespel (Polyimide)

Products

C Series Wands

Made with Nylone
ESD Protection

F Series Wands

Made with Teflon body
No ESD Protection

Replacements Parts

Replacement parts for vacuum wafer handling wands